About: http://webisa.webdatacommons.org/431512987

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Most scatterometry measurements, for example, are performed over a range of independent parameters, which can include parameters such as wavelength, angle of incidence, and azimuth angle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com