About: http://webisa.webdatacommons.org/431802519

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the related art, circuit elements, such as transistors, are formed in scribe TEG regions, and characteristics of the circuit elements themselves are measured to judge whether the wafers are acceptable or defective.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com