About: http://webisa.webdatacommons.org/431833201

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An etch process such as a wet etch or a dry etch may be employed to remove the first and second stress-generating portions (40A, 40B).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es