About: http://webisa.webdatacommons.org/431889212

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 16A, a gate dielectric layer 410, a conductive layer 412, and a cap dielectric layer 414 are sequentially formed over the substrate by for example chemical vapor deposition (CVD) with the desired raw material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com