| http://www.w3.org/ns/prov#value | - An electrode material, such as TiN, TaN, W, Al, Ti, Ta, TiSiN, TaSiN, TiAlN, TaAlN, WN, C, Cu, or other suitable electrode material is deposited over exposed portions of electrode interface 204, spacer 212, phase change element 206, and dielectric material 214 to provide an electrode material layer.
|
