About: http://webisa.webdatacommons.org/432058693

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another example is a method of such configuring so that fluid may be introduced into the proximity head from the surface of the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com