About: http://webisa.webdatacommons.org/432210384

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	BACKGROUND OF THE INVENTION [0002] Spatial light modulators based on electromechanical grating devices are important for a wide range of applications, including display, data storage, spectroscopy and printing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es