About: http://webisa.webdatacommons.org/432307477

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If a plasma exists significantly in the lower region, all portions exposed to a plasma, including a wafer substrate, nanoparticles, and the lower electrode, become negatively charged.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au