About: http://webisa.webdatacommons.org/432456823

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A p-type impurity such as boron is ion-implanted in the resultant structure at an acceleration voltage of 100 keV and a dose of 2???1012 cm-2 by using the photoresist pattern as a mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es