About: http://webisa.webdatacommons.org/432733336

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Tungsten is a suitable conductive material, for which existing processes may be substituted in place of aluminum metallization processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com