| http://www.w3.org/ns/prov#value | - Suitable organic substituents include alkyls, such as lower alkyls (alkyls having 1 to 10 carbon atoms), aromatic moieties, such as phenyl, and other organic substituents such that the deposition precursors containing these substituents have a sufficient vapor pressure (or partial pressure when using a carrier gas) to allow useful deposition rates (deposition of at least 10 ???/min).
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