About: http://webisa.webdatacommons.org/432845447

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, in order to improve a step coverage characteristic for openings such as contact holes or through holes, a tungsten layer deposited by a chemical vapor deposition (CVD) process is inserted between the lower metal
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com