About: http://webisa.webdatacommons.org/433793365

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 13 is an enlarged cross sectional view of a substrate which is applied to the substrate processing apparatus illustrated in FIG. 12; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.es