About: http://webisa.webdatacommons.org/433851944

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A MEMS integrated micro-optical communication device may include at least one micro-optical element such as a micro-lens for forming a light beam and a MEMS comb drive actuator for selectively steering the formed light beam.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com