About: http://webisa.webdatacommons.org/433933757

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Single use of scatterometry involves a higher risk, such risk being particularly acute in the case of large intrachip CD variation because it is unable to sufficiently monitor intrachip CD variation including local CD error.
http://www.w3.org/ns/prov#wasQuotedFrom	deepdyve.com