About: http://webisa.webdatacommons.org/434038995

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a plan view illustrating a transfer mechanism provided in a carry-out process section incorporated in the cleaning process section;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com