About: http://webisa.webdatacommons.org/434074545

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a magnified cross sectional view of a portion of the embodiment of an M???N array of mirrors fabricated on a VLSI (very large scale integration) substrate in accordance with an embodiment of the subject invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca