About: http://webisa.webdatacommons.org/434074976

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since the positioning mechanism is mounted inside the substrate susceptor 1supplied with a high-frequency voltage, it is made of an insulating material such as quartz, alumina or resin to prevent abnormal electric discharge.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com