About: http://webisa.webdatacommons.org/434083392

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic vertical cross sectional view of an ECR ion source according to a first, preferred embodiment of the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com