About: http://webisa.webdatacommons.org/434467002

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	More specifically, an object of this invention is a system and a method for the automatic inspection of replicated mask and wafer patterns by providing an output representation indicative of multiple compared patterns.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com