About: http://webisa.webdatacommons.org/435227092

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, a layer of photoresist is spin-coated onto a substrate, and the resist layer is selectively exposed to a form of radiation, such as ultraviolet light, electrons, or x-rays.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com