| http://www.w3.org/ns/prov#value | - P-CVD (plasma CVD) is utilized to apply and overcoat the piezoelectric body with a IV group element contained hydrocarbon such as hydrocarbon, oxygen contained hydrocarbon and sulfur contained hydrocarbon; a halogen contained hydrocarbon such as nitrogen contained hydrocarbon, silicon contained hydrocarbon and fluorine contained hydrocarbon; or a III group element contained hydrocarbon.
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