About: http://webisa.webdatacommons.org/435640223

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method of fabricating ultra-small semiconductor device is now disclosed referring to FIGS. 3-7, which method is an improvement over the method described above with reference to FIG. 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com