About: http://webisa.webdatacommons.org/43575247

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a plan view schematically showing an example of a reticle suitable for use with a reference wafer, in the exposure apparatus of the FIG. 1 embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com