About: http://webisa.webdatacommons.org/435824442

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The integrated circuitry of claim 22 wherein the opposing sidewalls extend to a trench base extending between the sidewalls, the trench base including a portion which is substantially perpendicular to the sidewall opposing portions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com