About: http://webisa.webdatacommons.org/435844078

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, an insulating film 55, made of a material such as a thermal oxide film and the like, is formed on the surface of the semiconductor substrate 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com