| http://www.w3.org/ns/prov#value | - Therefore, it is noted that there is an effect when the impurity concentration of the part of thelayer 14 near the layer 16 is low.TABLE-US-00002 TABLE 2 Impurity Concentration Thick. (atom/cm.sup.3) Layer Material (nm) Impurity Set Measured Layer 28 GaAs 30 Si 3 .times. 10.sup.18 3 .times. 10.sup.18 Layer 20 Al.sub.0.3Ga.sub.0.7As 500 Si 3 .times. 10.sup.18 3 .times. 10.sup.18 Layer 18 Al.sub.0
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