About: http://webisa.webdatacommons.org/435894727

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the condenser lens system 7 is effective to converge each of the beams of light from the optical integrator 4 to uniformly illuminate the surface of a reticle 9, which is the surface to be illuminated, such as shown in FIG. 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es