About: http://webisa.webdatacommons.org/43607642

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	is formed by a material such as Ta, Ti, TaN, or TiN by well-known sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com