About: http://webisa.webdatacommons.org/436346888

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The laser beam converged into a linear shape and having a width of from 100 to 1000 ??m, e.g. 400 ??m, is irradiated to the entire substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr