About: http://webisa.webdatacommons.org/436409906

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Where substrate 12 is monocrystalline silicon, implantation of a neutral species such as silicon and the like will add interstitials to substrate 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com