About: http://webisa.webdatacommons.org/436518722

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The agents used during the reactive ion etching are selected to etch materials such as the TEOS or BPSG at a much faster rate than they etch nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com