About: http://webisa.webdatacommons.org/436747735

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The load lock chamber 104 includes a body assembly 202 fabricated from a rigid material such as stainless steel, aluminum or other suitable material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr