About: http://webisa.webdatacommons.org/436798785

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, in the well known CVD technique or the like, a via plug barrier metal film 75 is formed on a surface of the lower layer side inter-layered insulation film 23 of the second layer, including an inside surface of the via hole 74.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com