About: http://webisa.webdatacommons.org/437042409

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etch-back method has problems such as the difficulty of uniformly applying a resin and uniformly controlling a thickness of a wafer being etched.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com