About: http://webisa.webdatacommons.org/437057853

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate insulator 112 preferably including an inorganic material such as SiNx or SiOx is formed by a PCVD (plasma chemical vapor deposition) method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com