About: http://webisa.webdatacommons.org/437157927

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The buried electrically insulating layer 102 may comprise a material such as silicon dioxide (as shown), silicon nitride, calcium fluoride or other suitable dielectric material, and may be formed using conventional SIMOX techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com