About: http://webisa.webdatacommons.org/437172811

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interlayer insulating films 71, 82 are formed of an organic insulating material having a low dielectric constant such as polyimide which has a lower dielectric constant than SiO2 (CVD- SiO2) or CVD???SiO2 formed by a CVD method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com