About: http://webisa.webdatacommons.org/43737822

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Oxygen, water, hydrogen peroxide, ammonia carbonate, and some other precursors and their mixtures have proven successful at copper etch over traditional dielectrics.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com