About: http://webisa.webdatacommons.org/437381548

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A typical plasma etching apparatus comprises a reactor in which there is a chamber through which reactive gas or gases are flowed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com