About: http://webisa.webdatacommons.org/437490661

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Pre-Deposition Treatment [0050] If the dielectric material comprises an oxide, for example hafnium dioxide (HfO2), the surface of the dielectric layer will comprise reactive hydroxyl (OH) groups.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es