About: http://webisa.webdatacommons.org/437823438

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other etching methods may also be used.In one embodiment, the device layer comprises a conductive material, such as a metal or metal alloy, which is patterned into rail shaped electrodes.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com