About: http://webisa.webdatacommons.org/437878935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other depositions, such as, for example, sputtering or other physical vapor depositions, or chemical vapor metal deposition with or without the optional seed layer may optionally be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com