About: http://webisa.webdatacommons.org/438196935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In alternative embodiments, fill material 61 could also be made of other materials, such as polyimide, BCB, SiO2, Si3N4, or other dielectrics, AlN, ZnO, LiNbO3, PZT, LiTaO3, Al2O3, or other piezoelectric materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr