About: http://webisa.webdatacommons.org/438216052

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an embodiment, a layer of a polymer such as polyamide may be deposited with a hard mask material, such as V, TiN or another metal, or SiO2, SiN or another dielectric material, followed by a layer of photoresist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk