About: http://webisa.webdatacommons.org/438420607

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the present embodiment, intermediate dielectric layer 220 can comprise Al2O3 and can be formed by depositing a layer of Al2O3 on high-k dielectric layer 216 using a MBE process or ALD process or other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com