About: http://webisa.webdatacommons.org/438438574

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another advantage of the present invention is a method of manufacturing a semiconductor device comprising a highly reliable passivated Cu interconnect member without increasing the RC of the Cu interconnect member.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com