About: http://webisa.webdatacommons.org/438561797

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Typical low-k materials in use have included carbon doped silicon dioxide such as commercially available Black Diamond??? and other materials that tend to be porous, thereby reducing the overall dielectric constant.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com