About: http://webisa.webdatacommons.org/438578100

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By physical and chemical reactions with reactive particles such as ions and other charged particles and radicals in the plasma, a thin film previously formed on the wafer surface is processed into a desired feature.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com