About: http://webisa.webdatacommons.org/438674123

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1A is a vertical cross-sectional view of a partially processed prior-art substrate, showing the accumulation of deposit on the edges of the features defining high-aspect-ratio trenches.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca